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IBM Journal of Research and Development  
Volume 46, Numbers 2/3, 2002
Scaling CMOS to the Limits
 Table of contents: arrowHTML arrowPDF arrowASCII   This article: arrowHTML arrowPDF arrowASCII arrowCopyright info
   

Process requirements for continued scaling of CMOS—the need and prospects for atomic-level manipulation - References
by P. D. Agnello

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