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IBM Journal of Research and Development  
Volume 41, Numbers 1/2, 1997
Optical lithography
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Chemical amplification resists: History and development within IBM - References
by H. Ito

References

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  4. (a) H. Ito, C. G. Willson, and J. M. J. Fréchet, "New UV Resists with Negative or Positive Tone," Digest of Technical Papers of 1982 Symposium on VLSI Technology, pp. 86-87; (b) H. Ito and C. G. Willson, "Chemical Amplification in the Design of Dry Developing Resist Materials," Technical Papers of SPE Regional Technical Conference on Photopolymers, 1982, pp. 331-353.
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