6th International Symposium

Magnetic Materials, Processes and Devices

Applications to Storage and Microelectromechanical Systems (MEMS)

Editors

S. Krongelb
Research Staff Member Emeritus
IBM T.J. Watson Research Center
Yorktown Heights, New York

L.T. Romankiw
IBM T.J. Watson Research Center
Yorktown Heights, New York

J.-W. Chang
Headway, Inc.
Milpitas, California

W. Schwarzacher
University of Bristol
Bristol, United Kingdom

C.H. Ahn Department of Electrical & Computer Engineering and Computer Science
University of Cincinnati
Cincinnati, Ohio

ELECTRODEPOSITION DIVISION

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TABLE OF CONTENTS

Preface

ix

Conference Organization	xi
Section I Storage: Business and Technology Overview	1
1. Magnetic Recording: Challenges and Opportunities J. Best, V. Marrello	3
2. The Disk Drive Industry's Dynamic Past     J.N. Porter	19
3. Magnetic Recording Heads for 60 Gb/in2 and Beyond     F.H. Liu, K. Stoev, X. Shi, H.C. Tong, M. Gibbons, M. Re	34
4. On The Road to 100 Gb/in2 - Advanced High Performance Media     M. Russak	45
5. Review of Thin-Film Write Heads for High Data Rate Recording     Y. Hsu, K Klaassen	52
Section II Magnetic Disks	61
6. Directions in Disk Drive Tribology: Laser Texture and Beyond     P.M. Baumgart, A.C. Tam	63
7. Advanced Media for Extremely High-Density Longitudinal Magnetic Recording     B.R. Acharya, E.N. Abarra, A. Inomata, I. Okamoto	69
8. Molecular Conformation and Tribology Performance of Perflouropolyether Lubricant     L.J. Huang, P. Henry, S. Chang	84
9. Magnetic Properties of Nickel-Phosphorus Deposits with Controllable Phosphorus Contents Prepared by Electrodeposition     C.-C. Hu, A. Bai	93
Section III Electrodeposited Magnetic Nanostructures	99
10. Patterned Electrodeposition of CoPt Micromagnets     P. Evans, I. Zana, G. Zangari	101
11. Fabrication and Magnetic Properties of Arrays of Electrodeposited Cylinders     M. Shima, M. Hwang, M. Farhoud, T.A. Savas, A. Tkaczyk,     J.U.C. Parrochon, W. Escoffier, H.I. Smith, C.A. Ross, W. Schwarzacher	111
12. Magnetic Anisotropy Phenomena in Electrodeposited Heterostructure Devices     K. Attenborough, L. Perez-Garcia, M. Cerisier, J.-P. Celis, J. De Boeck	125
13. Electrodeposition of Co Thin Films and Co/Cu Spin-Valves on Silicon     A.A. Pasa, M.L. Munford, E Voltolini, L. Seligman, M. Sardela,     M.L. Sartorelli	137
14. Ultrathin Electrodeposited Magnetic Films: Relevant for Magnetoelectronic Applications?     W. Schindler, Th. Koop, J. Kirschner	148
15. Electrodeposited GMR Co/Cu Multilayers     N.V. Myung, B.Y. Yoo, M Schwartz, K Nobe	154
Section IV Plated Materials for Magnetic Heads	165
16. Fabrication of High-Bs Soft Magnetic Thin Films by an Electrodeposition Technique for Next-Generation Magnetic Recording Field     T. Osaka, T. Yokoshima, T. Nakanishi	167
17. Pulsed Electrodeposition of Soft Magnetic CoNiFe Thin Films     T. Nakanishi, M. Ozaki, H.-S. Nam, T. Yokoshima, T. Osaka	176
18. The Effect of Preparation Conditions on the Magnetic Properties of Electroplated High-Bs CoNiFe Films     M. Saito, N. Ishiwata, K. Ohashi	185
19. The Structural and Magnetic Properties of Pulsed Current Electrodeposited Co and Co-Ni Alloy Films     K. Maruyama, A. Matsushita, M. Imai, H. Numata, O. Nittono	197
20. Magnetic Properties and Corrosion Resistance of Electrodeposited Fe-Co-Ni Alloys     X. Liu, G. Zangari	211
21. Electrodeposition of Soft CoNiFe, CoNiFeO and CoFeO Films with High Magnetic Saturation and High Resistivity     I. Tabakovic, V. Inturi, S. Riemer, A. Morrone, P. Jallen	220
22. Morphology of Soft Magnetic CoNiFe Films Electrodeposited in the Presence of Saccharin and Sodium Lauryl Sulfate     I. Tabakovic, V. Inturi, S. Riemer, P. Jallen, P. McGeehin	231
23. Corrosion Behavior of Electrodeposited Soft Magnetic NiFe, CoNiFe, CoNiFeO and CoFe Alloys S. Riemer, I. Tabakovic, V. Inturi, P. Jallen	241
24. Origin of Inclusion of Foreign Elements During the Electrodeposition of Soft Magnetic NiFe, CoNiFe, and CoNiFeO Alloys: SIMS and XPS Analysis     I. Tabakovic, S. Riemer, R. Kvitek, P. Jallen, V. Inturi	253
25. Electroplated CoFeCu Films in Write Heads: Plating and Magnetic Evaluation     E.I. Cooper, Y. Hsu, L.T. Romankiw, J.G. McCord, V. Nikitin	264
26. Magnetic Properties of Copper Laminated Magnetic CoFeCu Films Deposited from a Single Plating Bath by Current Modulation     P. Trouilloud, L.T. Romankiw, J.-W. Chang, K.C. Lin	276
27. Influence of Phosphorus on the Corrosion Properties of Electrodeposited CoFeCu Soft Magnetic Thin Films     R. Bell, E.E. Kalu	287
28. Micro-Pattern Formation for Magnetic Recording Heads Using Electroless CoFeB Deposition     T. Yokoshima, S. Nakamura, D. Kaneko, T. Osaka, S. Takefusa, A. Tanaka	297
29. Electrodeposited CoP: Structural and Magnetic Properties     W. Ruythooren, E. de Wit, J. De Boeck, J.-P. Celis	309
Section V Magnetic Structures, Fabrication and Properties	317
30. The Impact of Resolution Enhancement Technology on TFH Industry     L. Tong	319
31. Nanometer Trackwidth Definition by E-Beam Lithography for Advanced Magnetic Recording Heads     K. Lin, J.-W. Chang, Z. Cui, K. Ju, S. Araki	332
32. Focused Ion beam Production Micromachining of Magnetic Head Write Poles     B. Miller, R. Lee, D. Hahn, G. Brown, A. Zahler	343
33. Submicron Write Track Fabrication Using RIE and KrF Excimer Laser Stepper     T. Okada, N. Yoshida, K. Etoh, I. Nunokawa, M. Fuyama, T. Kawabe	348
34. Composition and Plating Rate Variations in Narrow Pole Tips for Write Heads     T. Dinan, J.A. Katine, P. Rice	359
35. Micromagnetic Computer Simulation of Ultra-High Density Recording with the Use of a Planar-Type Head     S.H. Lim, H. Takano, K. Yoshida	366
36. The Use of CMP in Making Computer Read/Write Heads     P.B. Phipps, F.H. Dill, F.O. Eschbach, E. Lee, F. Martin	381
37. Temperature Distribution and Its Impact on Reliability of MR/GMR Heads     C.T. Lin, S. Kao, J.-W. Chang	389
38. Structural Properties and Electrical Resistivity of Sputter-Deposited Co-Sm-Co Trilayers     K. Tanahashi, M. Kawahara, N. Taguchi, T. Sugimoto, K. Motoi	396
39. High Frequency Measurements of Magnetic Films     D. Olsen, P. Koonath, T. Yeh, Z. Qian, D. Wang, R.F. Drayton,     J. Sivertsen, A. Gopinath	404
40. Design and Characteristics of a Wafer-Scale Uniform Injection Cell for Thin Film Electroplating     H. Ortiz-Ibarra, J.A. Medina	410
41. Electrochemical Deposition of Nanocomposite Soft Magnetic Materials     I. Shao, P.M. Vereecken, P.C. Searson, C.L. Chien, R.C. Cammarata	420
42. Electrochemical Deposition of Bi on GaAs     P.M. Vereecken, P.C. Searson	431
Section VI Magnetic MEMS	441
43. Hybrid Technologies for Micromachined Magnetic Devices     M.A.M. Gijs, F. Amalou, M. Saidani, E. Bornand	443
44. Integrated Ferromagnetic Microsensors and Microactuators     J.W. Judy, H. Yang, N.V. Myung, C.-K. Yang, M. Schwartz, K. Nobe	456
45. A Magnetic Flexible Membrane Actuator for Micro Fluid Pumping     C. Liu	469
46. Latching Micro Magnetic Relays     M. Ruan, J. Shen, C.B. Wheeler	485
47. Electroplated Co-Ni-Mn-P-Based Hard Magnetic Arrays and Their Applications to Microactuators     H.J. Cho, C.H. Ahn	495
48. Electrodeposited Hard Magnetic Thin Films for MEMS Applications     N.V. Myung, D.Y. Park, M. Schwartz, K. Nobe, H. Yang, C.-K. Yang,     J.W. Judy	506
49. Effects of Annealing on the Residual Stress and Bending in Sputtered Thin Films of Giant Magnetostrictive Alloys     S.M. Na, S.J. Suh, J.M. Jung, H.J. Kim, S.H. Lim	521
50. Applications of Integrated Micromagnetic Devices at High Frequencies     M. Yamaguchi, K.I. Arai	536
51. AC and DC Current Dependence of On-Chip Inductors     E. Wesseling, E. Brandon, U. Lieneweg, R. Rub, S. Gupta, T.C. Nam,     C.H. Ahn	547
52. Microinductors for Spacecraft Power Electronics     E. Brandon, E. Wesseling, V. White, U. Lieneweg, H. Cherry, J. Podosek, A. Hernandez-Pellerano	559
53. Fully Integrated Magnetic Components for Wireless Communications     J.Y. Park	568
54. Post-CMOS Integrated Planar Inductors for Monolilthic Power Management Chips     T.M. Liakopoulos, R.W. Filas, A. Lotfi	580
55. Magneto-Impedance and Domain Structure of Micropatterned Amorphous Magnetic Ribbons     F. Amalou, X. Houriet, E.L. Bornand, M.A.M. Gijs	592
56. Electrical Energy Monitoring Via Silicon Hall Effect Devices S.K. Gamage, H.T. Henderson	600
Section VII Author Index and Key Word Index	611
Author Index	613
Key Word Index	615

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