Magnetic Materials, Processes and Devices

Applications to Storage and Microelectromechanical Systems (MEMS)

Editors

L.T. Romankiw
IBM T.J. Watson Research Center
Yorktown Heights, New York

S. Krongelb Research Staff Member Emeritus
IBM T.J. Watson Research Center
Yorktown Heights, New York

C.H. Ahn Department of Electrical & Computer Engineering and Computer Science
University of Cincinnati
Cincinnati, Ohio

ELECTRODEPOSITION DIVISION

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TABLE OF CONTENTS

Preface	xi
Conference Organization	xiii
Section I
Storage: Business and Technology Overview	1

1. The Future of Magnetic Data Storage      D. A. Thompson	3
2. A Micro Hard Disk Drive      T. C. Reiley, T. R. Albrecht, D. W. Albrecht, K. Kuroki and M. Aoyagi	10
3. Magnetic Recording Technology for 10 Gb/Sq" and Beyond      M. L. Mallary	19
4. A Review on High Density Storage Research at AIT      K. Ouchi	33
5. Thin Film Magnetic Media-Survey and Future Direction     M. A. Russak	49
6. Recording Performance of Advanced Thin Film Magneto-Resistive Tape Heads     W. J. O'Kane, M. P. Connolly, T. K. McLaughlin, C. J. O'Kane, G. D. McMullin, A. J. Gillespie and M. McGarry	51
Section II
Magnetic Heads - Advanced Technology and Fabrication	63
7. Thin Film Head Design for High Density Recording      I. Sato T. Aoyama and Y. Soeno	65
8. 10 Gb/in2 Recording with DSMR AMR Heads on Low Noise Film Disks      B. L. Hu, K. Ju, C. C. Han, D. Chhabra, Y. S. Tang, Y. Guo, C. Horng, T. Torng, B. B. Lal, S. Malhotra, Z. Jiang, M. M. Yang, M. Sullivan and J. Chao	82
9. Low Inductance Single-Pole Head on Flying Slider     H. Muraoka, K. Sato, Y. Sugita and Y. Nakamura	95
10. Plasma Etching of NiFeCo, NiMnSb and CoFeB-Based Multilayers      K. B. Jung, H. Cho, T. Feng, Y. D. Park, S. J. Pearton, J. A. Caballero, J. R. Childress, F. Ren	105
11. The Role of Inert Gases in Reactive Ion Etching of A12O3 -TiC (N58) Mixed Phases for Slider Air Bearing Surface Patterning      S. V. Nguyen, D. Perez, R. Craig, M. Straub, A. Ting, R. Hsiao, C. Hwang, D. Haney, T. Neumann	115
12. Low Temperature Cured Photoresist for Coil Insulators      T. Okada, M. Komuro, M. Fuyama, T. Kawabe	123
13. Corrosion Resistance of Nickel-Iron Electrodeposits      M. Gladkovas, D. Bucinskiene, A. Narkevicus	131
Section III Giant Magnetoresistance	139
14. New Approaches to Spin Valve Head Materials and Its Future Trends      H. C. Tong, C. Qian, L. Miloslavsky, X. Shi, F. Liu, Y. Huai, M. Lederman, S. Dey	141
15. GMR Effect in Electrodeposited Cu/CoNi(Cu) Multilayers     P. L. Cavallotti, D. Manara, R. Vallauri, A. Vicenzo, J. M. Da Silva, M. A. Sa	156
16. Magnetic Four-Fold Anisotropy of Co/Cu Films Electrodeposited on Cu/Si(001) and GaAs(001) Substrates      M. Shima, L. Salamanca-Riba, T. Moffat R. McMichael	176
17. Magnetic and Structural Properties of Sputter-Deposited Co-Sm Bilayers      K. Tanahashi, M. Doi, M. Takano, N. Kumagai, K. Motoi	188
18. GMR Materials by Electrodeposition and Magneto-Deposition Methods      N. Myung, K. H. Ryu, M. Schwartz, K. Nobe	194
Section IV Magnetic Disks	209
19. Selected Topics for Disc Media Analysis      S. Chang and L. Huang	211
20. Noise Characteristics and Microstructure of Co-Cr-Ta Films for Longitudinal Recording Disks Deposited by Facing-Targets Sputtering      K. Noda and M. Naoe	223
21. Preparation and Noise Properties of Perpendicular/Longitudinal Composite Media prepared by Electroless-Depositioned Method      T. Onoue, N. Miyamoto, J. Hokkyo, T. Homma and T. Osaka	231
22. Low Noise Property of Co-Cr-M Perpendicular Magnetic Recording Media at High Recording Density      J. Ariake, N. Honda and K. Ouchi	242
23. Fabrication, Reading and Writing of Quantized Magnetic Disks with 65 Gbit/in2 Perpendicular Storage Density and 30 Gbit/in2 Longitudinal Storage Density      S. Y. Chou, L. Kong, W. Wu and B. Cui	253
24. Overview of Corrosion on Thin Film Magnetic Media and Its Implication on Head Disk Interface      R. W. J. Chai, C. W. Wang, J. J. K. Lee and W. T. Tang	255
25. Performances Improvement of Spindle Motor for DVD Drive      K.-C. Chiu, T.-F. Ying and D.-R. Huang	269
Section V
MEMS Technology Overviews	279
26. Microactuators for Precise Head Positioning in Hard Disk Drives      T. Imamura, S. Koganezawa and Y. Uematsu	281
27. Applications for Micro-Machined Components in Magnetic Recording Heads      A. Swann, B. Wissman, R. Hipwell, P. Crane, W. Bonin, B. Zhang, J. Wright, P. Goglia	296
28. Magnetostatic MEMS Research at Caltech      Y.-C. Tai	308
29. Deep X-ray Lithography Based Fabrication of Rare-Earth Permanent Magnets and their Application to Microactuators      T. R. Christenson, T. J. Garino and E.L. Venturini	312
Section VI
Magnetic MEMS Devices	325
30. Microactuators Driven by Giant Magnetostrictive Thin Films      S. H. Lim, Y. S. Choi, S. H. Han, H. J. Kim, S. Moon, H. K. Kang, M. H. Oh and C. H. Ahn	327
31. 1 GHz-Driven Magnetic Thin-Film Inductor for RF Front-End Impedance Matcher in a Mobile Communication Handset      M. Yamaguchi, Y. Takahashi, K. Suezawa, K. I. Aria, S. Kikuchi, W. D. Li, S. Tanabe and K. Ito	342
32. Magnetostrictive Thin-Film Transducer Elements for Micro-Electro-Mechanical Systems      W. J. Karl, R. Watts, A. L. Powell, C. R. Whitehouse, R. B. Yates, M. R. J. Gibbs	354
33. Electro-Deposition of Fe-B Films and Their Magnetic and Magnetoelastic Properties      N. Fujita, M. Inoue, K. I. Arai, M. Izaki and T. Fujii	368
34. A New Electromagnetic Actuator Using Through-hole Plating of Nickel/Iron Permalloy      D. J. Sadler, T. M. Liakopoulos and C. H. Ahn	377
35. Micromachined Inductors with Electroplated Magnetically Anisotropic Alloy Cores
J. Y. Park and M. G. Allen	389
36. Microfabricated Toroidal-Type Planar Inductors for MEMS and Power Electronic Applications
T. M. Liakopoulos and C. H. Ahn	402
37. Microfabricated Transformers Using UV Lithography-Based LIGA-Like Process
T. M. Liakopoulos and C. H. Ahn	413
38. Planar Micromagnetic x/y/z Scanner with Five Degrees of Freedom      M. Lutwyche, U. Dreschler, W. Haeberle, H. Rothuizen, R. Widmer, P. Vettiger and J. Thaysen	423
39. Parallel Magnetic Actuation of Hinged Microstructures      Y. W. Yi and C. Liu	434
40. A Magnetically Driven Microoptical Switch      H. Toshiyoshi, D. Miyauchi and H. Fujita	446
41. The One Degree of Freedom Micromachine      S. Bhansali, A. L. Zhang, P. Jones, D. K. Sood and R. B. Zmood	460
Section VII
Deposition of Soft Magnetic Materials and Device Related Properties for Heads and MEMS	471
42. New Trends on Head Core Materials for Next Generation Magnetic Recording      T. Osaka and T. Yokoshima	473
43. Electrodeposited High Magnetic Moment CoFeCu for Thin Film Recording Heads      J-W. Chang, P. C. Andricacos, B. Petek, P. L. Troilloud and L. T. Romankiw	488
44. Optimization of CoFeCu Alloy for Magnetic Components      G. Poupon	509
45. Pulse Plating Magnetic Deposits of CoFeCr Alloys      J.-M. Maire, G. Poupon, J. Pagetti and M.-P. Gigandet	519
46. Effect of Additives in the Electrochemical Preparation of Soft Magnetic CoNiFe Films      I. Tabakovic, S. Riemer, P. Jallen, V. Inturi and A. Thayer	531
47. Structure and Magnetic Properties of Electroplated Co-Fe-P Thin Films      E. E. Kalu	545
48. Measurements of Saturation Magnetostriction of RF-Sputtered Thin Film Single Layer NiFe, Co and Bi-Layer Co/NiFe, NiFe/Co on Si3N4     J.-M Sivertsen, T. Yeh, C. -L. Lin, D. -H. Han and J. H. Judy	553
49. Heat-treatment Effect on Bilayer Material Composed of Rapid-Quenched Amorphous Ribbon with Electrodepositioned Co-based Film on It      K. Maruyama, T. Sato, H. Numata, O. Nittono and I. Ohno	562
50. Influence of Crystallline Structure and Sulfur Inclusion on Corrosion Properties of Electrodeposited CoNiFe Soft Magnetic Films      T. Momma, Y. Sogawa and T. Osaka	572
Section VIII
Electrodeposition Processes and Other Technologies	581
51. Simplified Model of Iron-Group Elemental Metal and Binary Alloy Electrodeposition      K. Y. Sasaki and J. B. Talbot	583
52. Functionally Graded Magnetic Thin Films Prepared by Electroless Deposition      T. Homma, Y. Kita and T. Osaka	599
53. The Chemistry of Electroless Nickel Deposition with Phosphinate      M. Benje, U. Hofmann and K. Weil	607
54. Ion Implantation Seeding of Electroplated Permalloy Films on Silicon      M. K. Ghantasala and D. K. Sood	619
55. A Study of Initial Stages in Film Electrodeposition and Investigation of Structure of Magnetic Cobalt - Tungsten Alloys      V. Rachinskas, L. Orlovskaya and M. Gladkovas	633
56. Electrochemical Deposition of Fe-Tb-O Films with AC Currents and Their Fundamental Properties      P. B. Lim, M. Inoue, M. Izaki, K. I. Arai, K. Yamada and T. Fujii	639
57. Thin Film Alloy Electrodeposits of Transition Metals and Rare Earth Metals from Aqueous Media      M. Schwartz, N. Myung, F. He and K. Nobe	646
58. Fabrication of Magnetic and Electronically Conducting Nano-Composites      Z. Qi and R. B. Lennox	660
59. A Study on the Wet Etching Behavior of CoNbZr/Cu/CoNbZr Multi-Layer Films Formed by RF Magnetron Sputtering      J.-H Yoon, J.-S. Song, B. Mitton, R. Latanision and H.-S. Kim	671
60. Optimization Process of a Novel Rotating Crystat (RC) Technique for Magnetic Material Preparation      H. Kockar	680
61. Magnetic and Structural Analysis of Iron Films Produced by a Novel Rotating Cryostat (RC) Technique      H. Kockar, R. Demirci and N. Tutkun	689
Section IX
Author Index and Key Word Index	697
Author Index	699
Key Word Index	703